9/4/2010	10:59:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	10:59:09 AM	Recipe started at 10:59 AM
9/4/2010	10:59:09 AM	H2 valve closed
9/4/2010	10:59:09 AM	BCl3 valve closed
9/4/2010	10:59:09 AM	PH3 valve closed
9/4/2010	10:59:09 AM	SiCl4 pre valve closed
9/4/2010	10:59:09 AM	SiCl4 post valve closed
9/4/2010	10:59:09 AM	Main Vac valve closed
9/4/2010	10:59:09 AM	Bypass valve closed
9/4/2010	10:59:09 AM	Bubbler valve closed
9/4/2010	10:59:09 AM	Helium valve opened
9/4/2010	10:59:09 AM	Helium MFC set to  500.000000
9/4/2010	10:59:09 AM	H2 MFC set to  0.000000
9/4/2010	10:59:09 AM	BCl3 MFC set to  0.000000
9/4/2010	10:59:09 AM	PHl3 MFC set to  0.000000
9/4/2010	10:59:09 AM	SiCl4 MFC set to  0.000000
9/4/2010	10:59:09 AM	Bypass solenoid MFC set to  0.000000
9/4/2010	10:59:09 AM	Tube furnace set to 0
9/4/2010	11:00:29 AM	Helium valve closed
9/4/2010	11:00:29 AM	H2 valve closed
9/4/2010	11:00:29 AM	BCl3 valve closed
9/4/2010	11:00:29 AM	PH3 valve closed
9/4/2010	11:00:29 AM	SiCl4 pre valve closed
9/4/2010	11:00:29 AM	SiCl4 post valve closed
9/4/2010	11:00:29 AM	Main Vac valve closed
9/4/2010	11:00:29 AM	Bypass valve closed
9/4/2010	11:00:29 AM	Bubbler valve closed
9/4/2010	11:00:29 AM	Helium MFC set to  0.000000
9/4/2010	11:00:29 AM	H2 MFC set to  0.000000
9/4/2010	11:00:29 AM	BCl3 MFC set to  0.000000
9/4/2010	11:00:29 AM	PHl3 MFC set to  0.000000
9/4/2010	11:00:29 AM	SiCl4 MFC set to  0.000000
9/4/2010	11:00:29 AM	Bypass solenoid MFC set to  0.000000
9/4/2010	11:00:29 AM	Tube furnace set to 0
9/4/2010	11:00:30 AM	Run finished at 11:00 AM
9/4/2010	11:00:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	11:13:18 AM	Program exited cleanly
9/4/2010	11:19:26 AM	Program started normally
9/4/2010	11:19:26 AM	Helium valve closed
9/4/2010	11:19:26 AM	H2 valve closed
9/4/2010	11:19:26 AM	BCl3 valve closed
9/4/2010	11:19:26 AM	PH3 valve closed
9/4/2010	11:19:26 AM	SiCl4 pre valve closed
9/4/2010	11:19:26 AM	SiCl4 post valve closed
9/4/2010	11:19:26 AM	Main Vac valve closed
9/4/2010	11:19:26 AM	Bypass valve closed
9/4/2010	11:19:26 AM	Bubbler valve closed
9/4/2010	11:19:26 AM	Helium MFC set to  0.000000
9/4/2010	11:19:26 AM	H2 MFC set to  0.000000
9/4/2010	11:19:26 AM	BCl3 MFC set to  0.000000
9/4/2010	11:19:26 AM	PHl3 MFC set to  0.000000
9/4/2010	11:19:26 AM	SiCl4 MFC set to  0.000000
9/4/2010	11:19:26 AM	Bypass solenoid MFC set to  760.000000
9/4/2010	11:19:27 AM	Tube furnace set to 0
9/4/2010	11:19:31 AM	Bypass valve opened
9/4/2010	11:19:38 AM	Main Vac valve opened
9/4/2010	11:19:39 AM	Main Vac valve closed
9/4/2010	11:19:39 AM	Main Vac valve opened
9/4/2010	11:45:00 AM	Bypass valve closed
9/4/2010	11:45:01 AM	Main Vac valve closed
9/4/2010	12:51:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	12:51:33 PM	Recipe started at 12:51 PM
9/4/2010	12:51:33 PM	Helium valve closed
9/4/2010	12:51:33 PM	H2 valve closed
9/4/2010	12:51:33 PM	BCl3 valve closed
9/4/2010	12:51:33 PM	PH3 valve closed
9/4/2010	12:51:33 PM	SiCl4 pre valve closed
9/4/2010	12:51:33 PM	SiCl4 post valve closed
9/4/2010	12:51:33 PM	Main Vac valve closed
9/4/2010	12:51:33 PM	Bubbler valve closed
9/4/2010	12:51:33 PM	Bypass valve opened
9/4/2010	12:51:33 PM	Helium MFC set to  0.000000
9/4/2010	12:51:33 PM	H2 MFC set to  0.000000
9/4/2010	12:51:33 PM	BCl3 MFC set to  0.000000
9/4/2010	12:51:33 PM	PHl3 MFC set to  0.000000
9/4/2010	12:51:33 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:51:33 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:51:33 PM	Tube furnace set to 0
9/4/2010	12:52:02 PM	Run aborted at 12:52 PM
9/4/2010	12:52:02 PM	Helium valve closed
9/4/2010	12:52:02 PM	H2 valve closed
9/4/2010	12:52:02 PM	BCl3 valve closed
9/4/2010	12:52:02 PM	PH3 valve closed
9/4/2010	12:52:02 PM	SiCl4 pre valve closed
9/4/2010	12:52:02 PM	SiCl4 post valve closed
9/4/2010	12:52:02 PM	Bypass valve closed
9/4/2010	12:52:02 PM	Main Vac valve closed
9/4/2010	12:52:02 PM	Bubbler valve closed
9/4/2010	12:52:02 PM	Helium MFC set to  0.000000
9/4/2010	12:52:02 PM	H2 MFC set to  0.000000
9/4/2010	12:52:02 PM	BCl3 MFC set to  0.000000
9/4/2010	12:52:02 PM	PHl3 MFC set to  0.000000
9/4/2010	12:52:02 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:52:02 PM	Tube furnace set to 0
9/4/2010	12:52:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	12:52:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	12:52:23 PM	Recipe started at 12:52 PM
9/4/2010	12:52:23 PM	Helium valve closed
9/4/2010	12:52:23 PM	H2 valve closed
9/4/2010	12:52:23 PM	BCl3 valve closed
9/4/2010	12:52:23 PM	PH3 valve closed
9/4/2010	12:52:23 PM	SiCl4 pre valve closed
9/4/2010	12:52:23 PM	SiCl4 post valve closed
9/4/2010	12:52:23 PM	Main Vac valve closed
9/4/2010	12:52:23 PM	Bubbler valve closed
9/4/2010	12:52:23 PM	Bypass valve opened
9/4/2010	12:52:23 PM	Helium MFC set to  0.000000
9/4/2010	12:52:23 PM	H2 MFC set to  0.000000
9/4/2010	12:52:23 PM	BCl3 MFC set to  0.000000
9/4/2010	12:52:23 PM	PHl3 MFC set to  0.000000
9/4/2010	12:52:23 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:52:23 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:52:23 PM	Tube furnace set to 0
9/4/2010	12:52:51 PM	Helium valve closed
9/4/2010	12:52:51 PM	H2 valve closed
9/4/2010	12:52:51 PM	BCl3 valve closed
9/4/2010	12:52:51 PM	PH3 valve closed
9/4/2010	12:52:51 PM	SiCl4 pre valve closed
9/4/2010	12:52:51 PM	SiCl4 post valve closed
9/4/2010	12:52:51 PM	Bubbler valve closed
9/4/2010	12:52:51 PM	Main Vac valve opened
9/4/2010	12:52:51 PM	Bypass valve opened
9/4/2010	12:52:51 PM	Helium MFC set to  0.000000
9/4/2010	12:52:51 PM	H2 MFC set to  0.000000
9/4/2010	12:52:51 PM	BCl3 MFC set to  0.000000
9/4/2010	12:52:51 PM	PHl3 MFC set to  0.000000
9/4/2010	12:52:51 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:52:51 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:52:51 PM	Tube furnace set to 0
9/4/2010	12:52:51 PM	Run finished at 12:52 PM
9/4/2010	12:52:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	12:55:13 PM	Helium MFC set to  100.000000
9/4/2010	12:55:15 PM	Helium valve opened
9/4/2010	12:55:31 PM	Helium valve closed
9/4/2010	12:56:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/4/2010	12:56:11 PM	Recipe started at 12:56 PM
9/4/2010	12:56:11 PM	Helium valve closed
9/4/2010	12:56:11 PM	H2 valve closed
9/4/2010	12:56:11 PM	BCl3 valve closed
9/4/2010	12:56:11 PM	PH3 valve closed
9/4/2010	12:56:11 PM	SiCl4 pre valve closed
9/4/2010	12:56:11 PM	SiCl4 post valve closed
9/4/2010	12:56:11 PM	Main Vac valve closed
9/4/2010	12:56:11 PM	Bubbler valve closed
9/4/2010	12:56:11 PM	Bypass valve opened
9/4/2010	12:56:11 PM	Helium MFC set to  0.000000
9/4/2010	12:56:11 PM	H2 MFC set to  0.000000
9/4/2010	12:56:11 PM	BCl3 MFC set to  0.000000
9/4/2010	12:56:11 PM	PHl3 MFC set to  0.000000
9/4/2010	12:56:11 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:56:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:56:11 PM	Tube furnace set to 0
9/4/2010	12:56:11 PM	Helium valve closed
9/4/2010	12:56:11 PM	H2 valve closed
9/4/2010	12:56:11 PM	BCl3 valve closed
9/4/2010	12:56:11 PM	PH3 valve closed
9/4/2010	12:56:11 PM	SiCl4 pre valve closed
9/4/2010	12:56:11 PM	SiCl4 post valve closed
9/4/2010	12:56:11 PM	Bubbler valve closed
9/4/2010	12:56:11 PM	Main Vac valve opened
9/4/2010	12:56:11 PM	Bypass valve opened
9/4/2010	12:56:11 PM	Helium MFC set to  0.000000
9/4/2010	12:56:11 PM	H2 MFC set to  0.000000
9/4/2010	12:56:11 PM	BCl3 MFC set to  0.000000
9/4/2010	12:56:11 PM	PHl3 MFC set to  0.000000
9/4/2010	12:56:11 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:56:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:56:12 PM	Tube furnace set to 0
9/4/2010	12:56:17 PM	H2 valve closed
9/4/2010	12:56:17 PM	BCl3 valve closed
9/4/2010	12:56:17 PM	PH3 valve closed
9/4/2010	12:56:17 PM	SiCl4 pre valve closed
9/4/2010	12:56:17 PM	SiCl4 post valve closed
9/4/2010	12:56:17 PM	Bubbler valve closed
9/4/2010	12:56:17 PM	Helium valve opened
9/4/2010	12:56:17 PM	Main Vac valve opened
9/4/2010	12:56:17 PM	Bypass valve opened
9/4/2010	12:56:17 PM	Helium MFC set to  100.000000
9/4/2010	12:56:17 PM	H2 MFC set to  0.000000
9/4/2010	12:56:17 PM	BCl3 MFC set to  0.000000
9/4/2010	12:56:17 PM	PHl3 MFC set to  0.000000
9/4/2010	12:56:17 PM	SiCl4 MFC set to  0.000000
9/4/2010	12:56:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	12:56:18 PM	Tube furnace set to 0
9/4/2010	1:05:18 PM	Helium valve closed
9/4/2010	1:05:18 PM	H2 valve closed
9/4/2010	1:05:18 PM	BCl3 valve closed
9/4/2010	1:05:18 PM	PH3 valve closed
9/4/2010	1:05:18 PM	SiCl4 pre valve closed
9/4/2010	1:05:18 PM	SiCl4 post valve closed
9/4/2010	1:05:18 PM	Bubbler valve closed
9/4/2010	1:05:18 PM	Main Vac valve opened
9/4/2010	1:05:18 PM	Bypass valve opened
9/4/2010	1:05:18 PM	Helium MFC set to  0.000000
9/4/2010	1:05:18 PM	H2 MFC set to  0.000000
9/4/2010	1:05:18 PM	BCl3 MFC set to  0.000000
9/4/2010	1:05:18 PM	PHl3 MFC set to  0.000000
9/4/2010	1:05:18 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:05:18 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:05:18 PM	Tube furnace set to 0
9/4/2010	1:06:18 PM	H2 valve closed
9/4/2010	1:06:18 PM	BCl3 valve closed
9/4/2010	1:06:18 PM	PH3 valve closed
9/4/2010	1:06:18 PM	SiCl4 pre valve closed
9/4/2010	1:06:18 PM	SiCl4 post valve closed
9/4/2010	1:06:18 PM	Bubbler valve closed
9/4/2010	1:06:18 PM	Helium valve opened
9/4/2010	1:06:18 PM	Main Vac valve opened
9/4/2010	1:06:18 PM	Bypass valve opened
9/4/2010	1:06:18 PM	Helium MFC set to  100.000000
9/4/2010	1:06:18 PM	H2 MFC set to  0.000000
9/4/2010	1:06:18 PM	BCl3 MFC set to  0.000000
9/4/2010	1:06:18 PM	PHl3 MFC set to  0.000000
9/4/2010	1:06:18 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:06:18 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:06:18 PM	Tube furnace set to 0
9/4/2010	1:15:18 PM	Helium valve closed
9/4/2010	1:15:18 PM	H2 valve closed
9/4/2010	1:15:18 PM	BCl3 valve closed
9/4/2010	1:15:18 PM	PH3 valve closed
9/4/2010	1:15:18 PM	SiCl4 pre valve closed
9/4/2010	1:15:18 PM	SiCl4 post valve closed
9/4/2010	1:15:18 PM	Bubbler valve closed
9/4/2010	1:15:18 PM	Main Vac valve opened
9/4/2010	1:15:18 PM	Bypass valve opened
9/4/2010	1:15:18 PM	Helium MFC set to  0.000000
9/4/2010	1:15:18 PM	H2 MFC set to  0.000000
9/4/2010	1:15:18 PM	BCl3 MFC set to  0.000000
9/4/2010	1:15:18 PM	PHl3 MFC set to  0.000000
9/4/2010	1:15:18 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:15:18 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:15:18 PM	Tube furnace set to 0
9/4/2010	1:16:18 PM	H2 valve closed
9/4/2010	1:16:18 PM	BCl3 valve closed
9/4/2010	1:16:18 PM	PH3 valve closed
9/4/2010	1:16:18 PM	SiCl4 pre valve closed
9/4/2010	1:16:18 PM	SiCl4 post valve closed
9/4/2010	1:16:18 PM	Bubbler valve closed
9/4/2010	1:16:18 PM	Helium valve opened
9/4/2010	1:16:18 PM	Main Vac valve opened
9/4/2010	1:16:18 PM	Bypass valve opened
9/4/2010	1:16:18 PM	Helium MFC set to  100.000000
9/4/2010	1:16:18 PM	H2 MFC set to  0.000000
9/4/2010	1:16:18 PM	BCl3 MFC set to  0.000000
9/4/2010	1:16:18 PM	PHl3 MFC set to  0.000000
9/4/2010	1:16:18 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:16:18 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:16:18 PM	Tube furnace set to 0
9/4/2010	1:25:18 PM	Helium valve closed
9/4/2010	1:25:18 PM	H2 valve closed
9/4/2010	1:25:18 PM	BCl3 valve closed
9/4/2010	1:25:18 PM	PH3 valve closed
9/4/2010	1:25:18 PM	SiCl4 pre valve closed
9/4/2010	1:25:18 PM	SiCl4 post valve closed
9/4/2010	1:25:18 PM	Bubbler valve closed
9/4/2010	1:25:18 PM	Main Vac valve opened
9/4/2010	1:25:18 PM	Bypass valve opened
9/4/2010	1:25:18 PM	Helium MFC set to  0.000000
9/4/2010	1:25:18 PM	H2 MFC set to  0.000000
9/4/2010	1:25:18 PM	BCl3 MFC set to  0.000000
9/4/2010	1:25:18 PM	PHl3 MFC set to  0.000000
9/4/2010	1:25:18 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:25:18 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:25:19 PM	Tube furnace set to 0
9/4/2010	1:25:20 PM	Run finished at 1:25 PM
9/4/2010	1:25:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/4/2010	1:43:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	1:43:30 PM	Recipe started at 1:43 PM
9/4/2010	1:43:30 PM	H2 valve closed
9/4/2010	1:43:30 PM	BCl3 valve closed
9/4/2010	1:43:30 PM	PH3 valve closed
9/4/2010	1:43:30 PM	SiCl4 pre valve closed
9/4/2010	1:43:30 PM	SiCl4 post valve closed
9/4/2010	1:43:30 PM	Main Vac valve closed
9/4/2010	1:43:30 PM	Bypass valve closed
9/4/2010	1:43:30 PM	Bubbler valve closed
9/4/2010	1:43:30 PM	Helium valve opened
9/4/2010	1:43:30 PM	Helium MFC set to  500.000000
9/4/2010	1:43:30 PM	H2 MFC set to  0.000000
9/4/2010	1:43:30 PM	BCl3 MFC set to  0.000000
9/4/2010	1:43:30 PM	PHl3 MFC set to  0.000000
9/4/2010	1:43:30 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:43:30 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:43:30 PM	Tube furnace set to 0
9/4/2010	1:44:49 PM	Helium valve closed
9/4/2010	1:44:49 PM	H2 valve closed
9/4/2010	1:44:50 PM	BCl3 valve closed
9/4/2010	1:44:50 PM	PH3 valve closed
9/4/2010	1:44:50 PM	SiCl4 pre valve closed
9/4/2010	1:44:50 PM	SiCl4 post valve closed
9/4/2010	1:44:50 PM	Main Vac valve closed
9/4/2010	1:44:50 PM	Bypass valve closed
9/4/2010	1:44:50 PM	Bubbler valve closed
9/4/2010	1:44:50 PM	Helium MFC set to  0.000000
9/4/2010	1:44:50 PM	H2 MFC set to  0.000000
9/4/2010	1:44:50 PM	BCl3 MFC set to  0.000000
9/4/2010	1:44:50 PM	PHl3 MFC set to  0.000000
9/4/2010	1:44:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:44:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:44:50 PM	Tube furnace set to 0
9/4/2010	1:44:50 PM	Run finished at 1:44 PM
9/4/2010	1:44:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	1:53:09 PM	Recipe started at 1:53 PM
9/4/2010	1:53:09 PM	Helium valve closed
9/4/2010	1:53:09 PM	H2 valve closed
9/4/2010	1:53:09 PM	BCl3 valve closed
9/4/2010	1:53:09 PM	PH3 valve closed
9/4/2010	1:53:09 PM	SiCl4 pre valve closed
9/4/2010	1:53:09 PM	SiCl4 post valve closed
9/4/2010	1:53:09 PM	Main Vac valve closed
9/4/2010	1:53:09 PM	Bubbler valve closed
9/4/2010	1:53:09 PM	Bypass valve opened
9/4/2010	1:53:09 PM	Helium MFC set to  0.000000
9/4/2010	1:53:09 PM	H2 MFC set to  0.000000
9/4/2010	1:53:09 PM	BCl3 MFC set to  0.000000
9/4/2010	1:53:09 PM	PHl3 MFC set to  0.000000
9/4/2010	1:53:09 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:53:09 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:53:09 PM	Tube furnace set to 100
9/4/2010	1:53:50 PM	Helium valve closed
9/4/2010	1:53:50 PM	H2 valve closed
9/4/2010	1:53:50 PM	BCl3 valve closed
9/4/2010	1:53:50 PM	PH3 valve closed
9/4/2010	1:53:50 PM	SiCl4 pre valve closed
9/4/2010	1:53:50 PM	SiCl4 post valve closed
9/4/2010	1:53:50 PM	Bubbler valve closed
9/4/2010	1:53:50 PM	Main Vac valve opened
9/4/2010	1:53:50 PM	Bypass valve opened
9/4/2010	1:53:50 PM	Helium MFC set to  0.000000
9/4/2010	1:53:50 PM	H2 MFC set to  0.000000
9/4/2010	1:53:50 PM	BCl3 MFC set to  0.000000
9/4/2010	1:53:50 PM	PHl3 MFC set to  0.000000
9/4/2010	1:53:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:53:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:53:50 PM	Tube furnace set to 100
9/4/2010	1:54:50 PM	H2 valve closed
9/4/2010	1:54:50 PM	BCl3 valve closed
9/4/2010	1:54:50 PM	PH3 valve closed
9/4/2010	1:54:50 PM	SiCl4 pre valve closed
9/4/2010	1:54:50 PM	SiCl4 post valve closed
9/4/2010	1:54:50 PM	Bubbler valve closed
9/4/2010	1:54:50 PM	Helium valve opened
9/4/2010	1:54:50 PM	Main Vac valve opened
9/4/2010	1:54:50 PM	Bypass valve opened
9/4/2010	1:54:50 PM	Helium MFC set to  100.000000
9/4/2010	1:54:50 PM	H2 MFC set to  0.000000
9/4/2010	1:54:50 PM	BCl3 MFC set to  0.000000
9/4/2010	1:54:50 PM	PHl3 MFC set to  0.000000
9/4/2010	1:54:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	1:54:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	1:54:50 PM	Tube furnace set to 100
9/4/2010	2:03:50 PM	Helium valve closed
9/4/2010	2:03:50 PM	H2 valve closed
9/4/2010	2:03:50 PM	BCl3 valve closed
9/4/2010	2:03:50 PM	PH3 valve closed
9/4/2010	2:03:50 PM	SiCl4 pre valve closed
9/4/2010	2:03:50 PM	SiCl4 post valve closed
9/4/2010	2:03:50 PM	Bubbler valve closed
9/4/2010	2:03:50 PM	Main Vac valve opened
9/4/2010	2:03:50 PM	Bypass valve opened
9/4/2010	2:03:50 PM	Helium MFC set to  0.000000
9/4/2010	2:03:50 PM	H2 MFC set to  0.000000
9/4/2010	2:03:50 PM	BCl3 MFC set to  0.000000
9/4/2010	2:03:50 PM	PHl3 MFC set to  0.000000
9/4/2010	2:03:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:03:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:03:50 PM	Tube furnace set to 100
9/4/2010	2:04:50 PM	H2 valve closed
9/4/2010	2:04:50 PM	BCl3 valve closed
9/4/2010	2:04:50 PM	PH3 valve closed
9/4/2010	2:04:50 PM	SiCl4 pre valve closed
9/4/2010	2:04:50 PM	SiCl4 post valve closed
9/4/2010	2:04:50 PM	Bubbler valve closed
9/4/2010	2:04:50 PM	Helium valve opened
9/4/2010	2:04:50 PM	Main Vac valve opened
9/4/2010	2:04:50 PM	Bypass valve opened
9/4/2010	2:04:50 PM	Helium MFC set to  100.000000
9/4/2010	2:04:50 PM	H2 MFC set to  0.000000
9/4/2010	2:04:50 PM	BCl3 MFC set to  0.000000
9/4/2010	2:04:50 PM	PHl3 MFC set to  0.000000
9/4/2010	2:04:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:04:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:04:50 PM	Tube furnace set to 100
9/4/2010	2:13:50 PM	Helium valve closed
9/4/2010	2:13:50 PM	H2 valve closed
9/4/2010	2:13:50 PM	BCl3 valve closed
9/4/2010	2:13:50 PM	PH3 valve closed
9/4/2010	2:13:50 PM	SiCl4 pre valve closed
9/4/2010	2:13:50 PM	SiCl4 post valve closed
9/4/2010	2:13:50 PM	Bubbler valve closed
9/4/2010	2:13:50 PM	Main Vac valve opened
9/4/2010	2:13:50 PM	Bypass valve opened
9/4/2010	2:13:50 PM	Helium MFC set to  0.000000
9/4/2010	2:13:50 PM	H2 MFC set to  0.000000
9/4/2010	2:13:50 PM	BCl3 MFC set to  0.000000
9/4/2010	2:13:50 PM	PHl3 MFC set to  0.000000
9/4/2010	2:13:50 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:13:50 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:13:51 PM	Tube furnace set to 100
9/4/2010	2:14:51 PM	H2 valve closed
9/4/2010	2:14:51 PM	BCl3 valve closed
9/4/2010	2:14:51 PM	PH3 valve closed
9/4/2010	2:14:51 PM	SiCl4 pre valve closed
9/4/2010	2:14:51 PM	SiCl4 post valve closed
9/4/2010	2:14:51 PM	Bubbler valve closed
9/4/2010	2:14:51 PM	Helium valve opened
9/4/2010	2:14:51 PM	Main Vac valve opened
9/4/2010	2:14:51 PM	Bypass valve opened
9/4/2010	2:14:51 PM	Helium MFC set to  100.000000
9/4/2010	2:14:51 PM	H2 MFC set to  0.000000
9/4/2010	2:14:51 PM	BCl3 MFC set to  0.000000
9/4/2010	2:14:51 PM	PHl3 MFC set to  0.000000
9/4/2010	2:14:51 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:14:51 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:14:51 PM	Tube furnace set to 100
9/4/2010	2:23:51 PM	Helium valve closed
9/4/2010	2:23:51 PM	H2 valve closed
9/4/2010	2:23:51 PM	BCl3 valve closed
9/4/2010	2:23:51 PM	PH3 valve closed
9/4/2010	2:23:51 PM	SiCl4 pre valve closed
9/4/2010	2:23:51 PM	SiCl4 post valve closed
9/4/2010	2:23:51 PM	Bubbler valve closed
9/4/2010	2:23:51 PM	Main Vac valve opened
9/4/2010	2:23:51 PM	Bypass valve opened
9/4/2010	2:23:51 PM	Helium MFC set to  0.000000
9/4/2010	2:23:51 PM	H2 MFC set to  0.000000
9/4/2010	2:23:51 PM	BCl3 MFC set to  0.000000
9/4/2010	2:23:51 PM	PHl3 MFC set to  0.000000
9/4/2010	2:23:51 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:23:51 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:23:51 PM	Tube furnace set to 100
9/4/2010	2:23:52 PM	Run finished at 2:23 PM
9/4/2010	2:28:04 PM	Helium MFC set to  100.000000
9/4/2010	2:28:05 PM	Helium valve opened
9/4/2010	2:29:12 PM	Helium valve closed
9/4/2010	2:30:05 PM	Helium valve opened
9/4/2010	2:31:05 PM	Helium valve closed
9/4/2010	2:31:47 PM	Bypass valve closed
9/4/2010	2:31:48 PM	Main Vac valve closed
9/4/2010	2:32:01 PM	Bypass valve opened
9/4/2010	2:32:02 PM	Main Vac valve opened
9/4/2010	2:32:03 PM	Helium valve opened
9/4/2010	2:32:08 PM	Helium valve closed
9/4/2010	2:33:05 PM	Helium valve opened
9/4/2010	2:33:14 PM	Helium valve closed
9/4/2010	2:34:36 PM	Recipe started at 2:34 PM
9/4/2010	2:34:36 PM	Helium valve closed
9/4/2010	2:34:36 PM	BCl3 valve closed
9/4/2010	2:34:36 PM	PH3 valve closed
9/4/2010	2:34:36 PM	SiCl4 pre valve closed
9/4/2010	2:34:36 PM	SiCl4 post valve closed
9/4/2010	2:34:36 PM	Main Vac valve closed
9/4/2010	2:34:36 PM	Bypass valve closed
9/4/2010	2:34:36 PM	Bubbler valve closed
9/4/2010	2:34:36 PM	H2 valve opened
9/4/2010	2:34:36 PM	Helium MFC set to  0.000000
9/4/2010	2:34:36 PM	H2 MFC set to  500.000000
9/4/2010	2:34:36 PM	BCl3 MFC set to  0.000000
9/4/2010	2:34:36 PM	PHl3 MFC set to  0.000000
9/4/2010	2:34:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:34:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:34:36 PM	Tube furnace set to 0
9/4/2010	2:35:56 PM	Helium valve closed
9/4/2010	2:35:56 PM	BCl3 valve closed
9/4/2010	2:35:56 PM	PH3 valve closed
9/4/2010	2:35:56 PM	SiCl4 pre valve closed
9/4/2010	2:35:56 PM	SiCl4 post valve closed
9/4/2010	2:35:56 PM	Main Vac valve closed
9/4/2010	2:35:56 PM	Bypass valve closed
9/4/2010	2:35:56 PM	H2 valve opened
9/4/2010	2:35:56 PM	Bubbler valve opened
9/4/2010	2:35:56 PM	Helium MFC set to  0.000000
9/4/2010	2:35:56 PM	H2 MFC set to  500.000000
9/4/2010	2:35:56 PM	BCl3 MFC set to  0.000000
9/4/2010	2:35:56 PM	PHl3 MFC set to  0.000000
9/4/2010	2:35:56 PM	SiCl4 MFC set to  0.000000
9/4/2010	2:35:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:35:56 PM	Tube furnace set to 1000
9/4/2010	2:55:56 PM	Helium valve closed
9/4/2010	2:55:56 PM	BCl3 valve closed
9/4/2010	2:55:56 PM	PH3 valve closed
9/4/2010	2:55:56 PM	Main Vac valve closed
9/4/2010	2:55:56 PM	Bypass valve closed
9/4/2010	2:55:56 PM	H2 valve opened
9/4/2010	2:55:56 PM	SiCl4 pre valve opened
9/4/2010	2:55:56 PM	SiCl4 post valve opened
9/4/2010	2:55:56 PM	Bubbler valve opened
9/4/2010	2:55:56 PM	Helium MFC set to  0.000000
9/4/2010	2:55:56 PM	H2 MFC set to  500.000000
9/4/2010	2:55:56 PM	BCl3 MFC set to  0.000000
9/4/2010	2:55:56 PM	PHl3 MFC set to  0.000000
9/4/2010	2:55:56 PM	SiCl4 MFC set to  50.000000
9/4/2010	2:55:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	2:55:56 PM	Tube furnace set to 1000
9/4/2010	3:15:56 PM	H2 valve closed
9/4/2010	3:15:56 PM	BCl3 valve closed
9/4/2010	3:15:56 PM	PH3 valve closed
9/4/2010	3:15:56 PM	SiCl4 pre valve closed
9/4/2010	3:15:56 PM	SiCl4 post valve closed
9/4/2010	3:15:56 PM	Main Vac valve closed
9/4/2010	3:15:56 PM	Bypass valve closed
9/4/2010	3:15:56 PM	Helium valve opened
9/4/2010	3:15:56 PM	Bubbler valve opened
9/4/2010	3:15:56 PM	Helium MFC set to  500.000000
9/4/2010	3:15:56 PM	H2 MFC set to  0.000000
9/4/2010	3:15:56 PM	BCl3 MFC set to  0.000000
9/4/2010	3:15:56 PM	PHl3 MFC set to  0.000000
9/4/2010	3:15:56 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:15:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:15:57 PM	Tube furnace set to 950
9/4/2010	3:20:57 PM	H2 valve closed
9/4/2010	3:20:57 PM	BCl3 valve closed
9/4/2010	3:20:57 PM	PH3 valve closed
9/4/2010	3:20:57 PM	SiCl4 pre valve closed
9/4/2010	3:20:57 PM	SiCl4 post valve closed
9/4/2010	3:20:57 PM	Main Vac valve closed
9/4/2010	3:20:57 PM	Bypass valve closed
9/4/2010	3:20:57 PM	Helium valve opened
9/4/2010	3:20:57 PM	Bubbler valve opened
9/4/2010	3:20:57 PM	Helium MFC set to  500.000000
9/4/2010	3:20:57 PM	H2 MFC set to  0.000000
9/4/2010	3:20:57 PM	BCl3 MFC set to  0.000000
9/4/2010	3:20:57 PM	PHl3 MFC set to  0.000000
9/4/2010	3:20:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:20:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:20:57 PM	Tube furnace set to 900
9/4/2010	3:25:57 PM	H2 valve closed
9/4/2010	3:25:57 PM	BCl3 valve closed
9/4/2010	3:25:57 PM	PH3 valve closed
9/4/2010	3:25:57 PM	SiCl4 pre valve closed
9/4/2010	3:25:57 PM	SiCl4 post valve closed
9/4/2010	3:25:57 PM	Main Vac valve closed
9/4/2010	3:25:57 PM	Bypass valve closed
9/4/2010	3:25:57 PM	Helium valve opened
9/4/2010	3:25:57 PM	Bubbler valve opened
9/4/2010	3:25:57 PM	Helium MFC set to  500.000000
9/4/2010	3:25:57 PM	H2 MFC set to  0.000000
9/4/2010	3:25:57 PM	BCl3 MFC set to  0.000000
9/4/2010	3:25:57 PM	PHl3 MFC set to  0.000000
9/4/2010	3:25:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:25:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:25:57 PM	Tube furnace set to 850
9/4/2010	3:30:57 PM	H2 valve closed
9/4/2010	3:30:57 PM	BCl3 valve closed
9/4/2010	3:30:57 PM	PH3 valve closed
9/4/2010	3:30:57 PM	SiCl4 pre valve closed
9/4/2010	3:30:57 PM	SiCl4 post valve closed
9/4/2010	3:30:57 PM	Main Vac valve closed
9/4/2010	3:30:57 PM	Bypass valve closed
9/4/2010	3:30:57 PM	Helium valve opened
9/4/2010	3:30:57 PM	Bubbler valve opened
9/4/2010	3:30:57 PM	Helium MFC set to  500.000000
9/4/2010	3:30:57 PM	H2 MFC set to  0.000000
9/4/2010	3:30:57 PM	BCl3 MFC set to  0.000000
9/4/2010	3:30:57 PM	PHl3 MFC set to  0.000000
9/4/2010	3:30:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:30:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:30:57 PM	Tube furnace set to 800
9/4/2010	3:35:57 PM	H2 valve closed
9/4/2010	3:35:57 PM	BCl3 valve closed
9/4/2010	3:35:57 PM	PH3 valve closed
9/4/2010	3:35:57 PM	SiCl4 pre valve closed
9/4/2010	3:35:57 PM	SiCl4 post valve closed
9/4/2010	3:35:57 PM	Main Vac valve closed
9/4/2010	3:35:57 PM	Bypass valve closed
9/4/2010	3:35:57 PM	Helium valve opened
9/4/2010	3:35:57 PM	Bubbler valve opened
9/4/2010	3:35:57 PM	Helium MFC set to  500.000000
9/4/2010	3:35:57 PM	H2 MFC set to  0.000000
9/4/2010	3:35:57 PM	BCl3 MFC set to  0.000000
9/4/2010	3:35:57 PM	PHl3 MFC set to  0.000000
9/4/2010	3:35:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:35:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:35:58 PM	Tube furnace set to 750
9/4/2010	3:40:58 PM	H2 valve closed
9/4/2010	3:40:58 PM	BCl3 valve closed
9/4/2010	3:40:58 PM	PH3 valve closed
9/4/2010	3:40:58 PM	SiCl4 pre valve closed
9/4/2010	3:40:58 PM	SiCl4 post valve closed
9/4/2010	3:40:58 PM	Main Vac valve closed
9/4/2010	3:40:58 PM	Bypass valve closed
9/4/2010	3:40:58 PM	Helium valve opened
9/4/2010	3:40:58 PM	Bubbler valve opened
9/4/2010	3:40:58 PM	Helium MFC set to  500.000000
9/4/2010	3:40:58 PM	H2 MFC set to  0.000000
9/4/2010	3:40:58 PM	BCl3 MFC set to  0.000000
9/4/2010	3:40:58 PM	PHl3 MFC set to  0.000000
9/4/2010	3:40:58 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:40:58 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:40:58 PM	Tube furnace set to 700
9/4/2010	3:45:58 PM	H2 valve closed
9/4/2010	3:45:58 PM	BCl3 valve closed
9/4/2010	3:45:58 PM	PH3 valve closed
9/4/2010	3:45:58 PM	SiCl4 pre valve closed
9/4/2010	3:45:58 PM	SiCl4 post valve closed
9/4/2010	3:45:58 PM	Main Vac valve closed
9/4/2010	3:45:58 PM	Bypass valve closed
9/4/2010	3:45:58 PM	Helium valve opened
9/4/2010	3:45:58 PM	Bubbler valve opened
9/4/2010	3:45:58 PM	Helium MFC set to  500.000000
9/4/2010	3:45:58 PM	H2 MFC set to  0.000000
9/4/2010	3:45:58 PM	BCl3 MFC set to  0.000000
9/4/2010	3:45:58 PM	PHl3 MFC set to  0.000000
9/4/2010	3:45:58 PM	SiCl4 MFC set to  0.000000
9/4/2010	3:45:58 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	3:45:58 PM	Tube furnace set to 0
9/4/2010	4:05:58 PM	Helium valve closed
9/4/2010	4:05:58 PM	H2 valve closed
9/4/2010	4:05:58 PM	BCl3 valve closed
9/4/2010	4:05:58 PM	PH3 valve closed
9/4/2010	4:05:58 PM	SiCl4 pre valve closed
9/4/2010	4:05:58 PM	SiCl4 post valve closed
9/4/2010	4:05:58 PM	Main Vac valve closed
9/4/2010	4:05:58 PM	Bypass valve closed
9/4/2010	4:05:58 PM	Bubbler valve closed
9/4/2010	4:05:58 PM	Helium MFC set to  0.000000
9/4/2010	4:05:58 PM	H2 MFC set to  0.000000
9/4/2010	4:05:58 PM	BCl3 MFC set to  0.000000
9/4/2010	4:05:58 PM	PHl3 MFC set to  0.000000
9/4/2010	4:05:58 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:05:58 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:05:58 PM	Tube furnace set to 0
9/4/2010	4:05:59 PM	Run finished at 4:05 PM
9/4/2010	4:06:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	4:07:00 PM	Recipe started at 4:06 PM
9/4/2010	4:07:00 PM	H2 valve closed
9/4/2010	4:07:00 PM	BCl3 valve closed
9/4/2010	4:07:00 PM	PH3 valve closed
9/4/2010	4:07:00 PM	SiCl4 pre valve closed
9/4/2010	4:07:00 PM	SiCl4 post valve closed
9/4/2010	4:07:00 PM	Main Vac valve closed
9/4/2010	4:07:00 PM	Bypass valve closed
9/4/2010	4:07:00 PM	Bubbler valve closed
9/4/2010	4:07:00 PM	Helium valve opened
9/4/2010	4:07:00 PM	Helium MFC set to  500.000000
9/4/2010	4:07:00 PM	H2 MFC set to  0.000000
9/4/2010	4:07:00 PM	BCl3 MFC set to  0.000000
9/4/2010	4:07:00 PM	PHl3 MFC set to  0.000000
9/4/2010	4:07:00 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:07:00 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:07:00 PM	Tube furnace set to 0
9/4/2010	4:07:00 PM	Helium valve closed
9/4/2010	4:07:00 PM	H2 valve closed
9/4/2010	4:07:00 PM	BCl3 valve closed
9/4/2010	4:07:00 PM	PH3 valve closed
9/4/2010	4:07:00 PM	SiCl4 pre valve closed
9/4/2010	4:07:00 PM	SiCl4 post valve closed
9/4/2010	4:07:00 PM	Main Vac valve closed
9/4/2010	4:07:00 PM	Bypass valve closed
9/4/2010	4:07:00 PM	Bubbler valve closed
9/4/2010	4:07:00 PM	Helium MFC set to  0.000000
9/4/2010	4:07:00 PM	H2 MFC set to  0.000000
9/4/2010	4:07:00 PM	BCl3 MFC set to  0.000000
9/4/2010	4:07:00 PM	PHl3 MFC set to  0.000000
9/4/2010	4:07:00 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:07:00 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:07:00 PM	Tube furnace set to 0
9/4/2010	4:07:01 PM	Run finished at 4:07 PM
9/4/2010	4:07:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	4:08:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	4:08:55 PM	Recipe started at 4:08 PM
9/4/2010	4:08:55 PM	H2 valve closed
9/4/2010	4:08:55 PM	BCl3 valve closed
9/4/2010	4:08:55 PM	PH3 valve closed
9/4/2010	4:08:55 PM	SiCl4 pre valve closed
9/4/2010	4:08:55 PM	SiCl4 post valve closed
9/4/2010	4:08:55 PM	Main Vac valve closed
9/4/2010	4:08:55 PM	Bypass valve closed
9/4/2010	4:08:55 PM	Bubbler valve closed
9/4/2010	4:08:55 PM	Helium valve opened
9/4/2010	4:08:55 PM	Helium MFC set to  500.000000
9/4/2010	4:08:55 PM	H2 MFC set to  0.000000
9/4/2010	4:08:55 PM	BCl3 MFC set to  0.000000
9/4/2010	4:08:55 PM	PHl3 MFC set to  0.000000
9/4/2010	4:08:55 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:08:55 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:08:55 PM	Tube furnace set to 0
9/4/2010	4:08:57 PM	Helium valve closed
9/4/2010	4:08:57 PM	H2 valve closed
9/4/2010	4:08:57 PM	BCl3 valve closed
9/4/2010	4:08:57 PM	PH3 valve closed
9/4/2010	4:08:57 PM	SiCl4 pre valve closed
9/4/2010	4:08:57 PM	SiCl4 post valve closed
9/4/2010	4:08:57 PM	Main Vac valve closed
9/4/2010	4:08:57 PM	Bypass valve closed
9/4/2010	4:08:57 PM	Bubbler valve closed
9/4/2010	4:08:57 PM	Helium MFC set to  0.000000
9/4/2010	4:08:57 PM	H2 MFC set to  0.000000
9/4/2010	4:08:57 PM	BCl3 MFC set to  0.000000
9/4/2010	4:08:57 PM	PHl3 MFC set to  0.000000
9/4/2010	4:08:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:08:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:08:57 PM	Tube furnace set to 0
9/4/2010	4:08:57 PM	Run finished at 4:08 PM
9/4/2010	4:08:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	4:23:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	4:23:55 PM	Recipe started at 4:23 PM
9/4/2010	4:23:55 PM	Helium valve closed
9/4/2010	4:23:55 PM	H2 valve closed
9/4/2010	4:23:55 PM	BCl3 valve closed
9/4/2010	4:23:55 PM	PH3 valve closed
9/4/2010	4:23:55 PM	SiCl4 pre valve closed
9/4/2010	4:23:55 PM	SiCl4 post valve closed
9/4/2010	4:23:56 PM	Main Vac valve closed
9/4/2010	4:23:56 PM	Bubbler valve closed
9/4/2010	4:23:56 PM	Bypass valve opened
9/4/2010	4:23:56 PM	Helium MFC set to  0.000000
9/4/2010	4:23:56 PM	H2 MFC set to  0.000000
9/4/2010	4:23:56 PM	BCl3 MFC set to  0.000000
9/4/2010	4:23:56 PM	PHl3 MFC set to  0.000000
9/4/2010	4:23:56 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:23:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:23:56 PM	Tube furnace set to 0
9/4/2010	4:24:37 PM	Helium valve closed
9/4/2010	4:24:37 PM	H2 valve closed
9/4/2010	4:24:37 PM	BCl3 valve closed
9/4/2010	4:24:37 PM	PH3 valve closed
9/4/2010	4:24:37 PM	SiCl4 pre valve closed
9/4/2010	4:24:37 PM	SiCl4 post valve closed
9/4/2010	4:24:37 PM	Bubbler valve closed
9/4/2010	4:24:37 PM	Main Vac valve opened
9/4/2010	4:24:37 PM	Bypass valve opened
9/4/2010	4:24:37 PM	Helium MFC set to  0.000000
9/4/2010	4:24:37 PM	H2 MFC set to  0.000000
9/4/2010	4:24:37 PM	BCl3 MFC set to  0.000000
9/4/2010	4:24:37 PM	PHl3 MFC set to  0.000000
9/4/2010	4:24:37 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:24:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:24:37 PM	Tube furnace set to 0
9/4/2010	4:24:37 PM	Run finished at 4:24 PM
9/4/2010	4:24:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	4:25:39 PM	Helium MFC set to  100.000000
9/4/2010	4:25:41 PM	Helium valve opened
9/4/2010	4:25:45 PM	Helium valve closed
9/4/2010	4:25:53 PM	Helium valve opened
9/4/2010	4:25:59 PM	Helium valve closed
9/4/2010	4:26:22 PM	Helium valve opened
9/4/2010	4:26:27 PM	Helium valve closed
9/4/2010	4:28:33 PM	Helium valve opened
9/4/2010	4:29:35 PM	Helium valve closed
9/4/2010	4:30:11 PM	Recipe started at 4:30 PM
9/4/2010	4:30:11 PM	Helium valve closed
9/4/2010	4:30:11 PM	H2 valve closed
9/4/2010	4:30:11 PM	BCl3 valve closed
9/4/2010	4:30:11 PM	PH3 valve closed
9/4/2010	4:30:11 PM	SiCl4 pre valve closed
9/4/2010	4:30:11 PM	SiCl4 post valve closed
9/4/2010	4:30:11 PM	Main Vac valve closed
9/4/2010	4:30:11 PM	Bubbler valve closed
9/4/2010	4:30:11 PM	Bypass valve opened
9/4/2010	4:30:11 PM	Helium MFC set to  0.000000
9/4/2010	4:30:11 PM	H2 MFC set to  0.000000
9/4/2010	4:30:11 PM	BCl3 MFC set to  0.000000
9/4/2010	4:30:11 PM	PHl3 MFC set to  0.000000
9/4/2010	4:30:11 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:30:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:30:11 PM	Tube furnace set to 0
9/4/2010	4:30:12 PM	Helium valve closed
9/4/2010	4:30:12 PM	H2 valve closed
9/4/2010	4:30:12 PM	BCl3 valve closed
9/4/2010	4:30:12 PM	PH3 valve closed
9/4/2010	4:30:12 PM	SiCl4 pre valve closed
9/4/2010	4:30:12 PM	SiCl4 post valve closed
9/4/2010	4:30:12 PM	Bubbler valve closed
9/4/2010	4:30:12 PM	Main Vac valve opened
9/4/2010	4:30:12 PM	Bypass valve opened
9/4/2010	4:30:12 PM	Helium MFC set to  0.000000
9/4/2010	4:30:12 PM	H2 MFC set to  0.000000
9/4/2010	4:30:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:30:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:30:12 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:30:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:30:12 PM	Tube furnace set to 0
9/4/2010	4:31:12 PM	H2 valve closed
9/4/2010	4:31:12 PM	BCl3 valve closed
9/4/2010	4:31:12 PM	PH3 valve closed
9/4/2010	4:31:12 PM	SiCl4 pre valve closed
9/4/2010	4:31:12 PM	SiCl4 post valve closed
9/4/2010	4:31:12 PM	Bubbler valve closed
9/4/2010	4:31:12 PM	Helium valve opened
9/4/2010	4:31:12 PM	Main Vac valve opened
9/4/2010	4:31:12 PM	Bypass valve opened
9/4/2010	4:31:12 PM	Helium MFC set to  100.000000
9/4/2010	4:31:12 PM	H2 MFC set to  0.000000
9/4/2010	4:31:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:31:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:31:12 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:31:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:31:12 PM	Tube furnace set to 0
9/4/2010	4:32:12 PM	Helium valve closed
9/4/2010	4:32:12 PM	H2 valve closed
9/4/2010	4:32:12 PM	BCl3 valve closed
9/4/2010	4:32:12 PM	PH3 valve closed
9/4/2010	4:32:12 PM	SiCl4 pre valve closed
9/4/2010	4:32:12 PM	SiCl4 post valve closed
9/4/2010	4:32:12 PM	Bubbler valve closed
9/4/2010	4:32:12 PM	Main Vac valve opened
9/4/2010	4:32:12 PM	Bypass valve opened
9/4/2010	4:32:12 PM	Helium MFC set to  0.000000
9/4/2010	4:32:12 PM	H2 MFC set to  0.000000
9/4/2010	4:32:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:32:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:32:12 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:32:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:32:12 PM	Tube furnace set to 0
9/4/2010	4:33:12 PM	H2 valve closed
9/4/2010	4:33:12 PM	BCl3 valve closed
9/4/2010	4:33:12 PM	PH3 valve closed
9/4/2010	4:33:12 PM	SiCl4 pre valve closed
9/4/2010	4:33:12 PM	SiCl4 post valve closed
9/4/2010	4:33:12 PM	Bubbler valve closed
9/4/2010	4:33:12 PM	Helium valve opened
9/4/2010	4:33:12 PM	Main Vac valve opened
9/4/2010	4:33:12 PM	Bypass valve opened
9/4/2010	4:33:12 PM	Helium MFC set to  100.000000
9/4/2010	4:33:12 PM	H2 MFC set to  0.000000
9/4/2010	4:33:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:33:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:33:12 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:33:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:33:12 PM	Tube furnace set to 0
9/4/2010	4:34:12 PM	Helium valve closed
9/4/2010	4:34:12 PM	H2 valve closed
9/4/2010	4:34:12 PM	BCl3 valve closed
9/4/2010	4:34:12 PM	PH3 valve closed
9/4/2010	4:34:12 PM	SiCl4 pre valve closed
9/4/2010	4:34:12 PM	SiCl4 post valve closed
9/4/2010	4:34:12 PM	Bubbler valve closed
9/4/2010	4:34:12 PM	Main Vac valve opened
9/4/2010	4:34:12 PM	Bypass valve opened
9/4/2010	4:34:12 PM	Helium MFC set to  0.000000
9/4/2010	4:34:12 PM	H2 MFC set to  0.000000
9/4/2010	4:34:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:34:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:34:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:34:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:34:13 PM	Tube furnace set to 0
9/4/2010	4:35:13 PM	H2 valve closed
9/4/2010	4:35:13 PM	BCl3 valve closed
9/4/2010	4:35:13 PM	PH3 valve closed
9/4/2010	4:35:13 PM	SiCl4 pre valve closed
9/4/2010	4:35:13 PM	SiCl4 post valve closed
9/4/2010	4:35:13 PM	Bubbler valve closed
9/4/2010	4:35:13 PM	Helium valve opened
9/4/2010	4:35:13 PM	Main Vac valve opened
9/4/2010	4:35:13 PM	Bypass valve opened
9/4/2010	4:35:13 PM	Helium MFC set to  100.000000
9/4/2010	4:35:13 PM	H2 MFC set to  0.000000
9/4/2010	4:35:13 PM	BCl3 MFC set to  0.000000
9/4/2010	4:35:13 PM	PHl3 MFC set to  0.000000
9/4/2010	4:35:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:35:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:35:13 PM	Tube furnace set to 0
9/4/2010	4:36:13 PM	Helium valve closed
9/4/2010	4:36:13 PM	H2 valve closed
9/4/2010	4:36:13 PM	BCl3 valve closed
9/4/2010	4:36:13 PM	PH3 valve closed
9/4/2010	4:36:13 PM	SiCl4 pre valve closed
9/4/2010	4:36:13 PM	SiCl4 post valve closed
9/4/2010	4:36:13 PM	Bubbler valve closed
9/4/2010	4:36:13 PM	Main Vac valve opened
9/4/2010	4:36:13 PM	Bypass valve opened
9/4/2010	4:36:13 PM	Helium MFC set to  0.000000
9/4/2010	4:36:13 PM	H2 MFC set to  0.000000
9/4/2010	4:36:13 PM	BCl3 MFC set to  0.000000
9/4/2010	4:36:13 PM	PHl3 MFC set to  0.000000
9/4/2010	4:36:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:36:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:36:13 PM	Tube furnace set to 0
9/4/2010	4:37:13 PM	H2 valve closed
9/4/2010	4:37:13 PM	BCl3 valve closed
9/4/2010	4:37:13 PM	PH3 valve closed
9/4/2010	4:37:13 PM	SiCl4 pre valve closed
9/4/2010	4:37:13 PM	SiCl4 post valve closed
9/4/2010	4:37:13 PM	Bubbler valve closed
9/4/2010	4:37:13 PM	Helium valve opened
9/4/2010	4:37:13 PM	Main Vac valve opened
9/4/2010	4:37:13 PM	Bypass valve opened
9/4/2010	4:37:13 PM	Helium MFC set to  100.000000
9/4/2010	4:37:13 PM	H2 MFC set to  0.000000
9/4/2010	4:37:13 PM	BCl3 MFC set to  0.000000
9/4/2010	4:37:13 PM	PHl3 MFC set to  0.000000
9/4/2010	4:37:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:37:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:37:13 PM	Tube furnace set to 0
9/4/2010	4:38:13 PM	Helium valve closed
9/4/2010	4:38:13 PM	H2 valve closed
9/4/2010	4:38:13 PM	BCl3 valve closed
9/4/2010	4:38:13 PM	PH3 valve closed
9/4/2010	4:38:13 PM	SiCl4 pre valve closed
9/4/2010	4:38:13 PM	SiCl4 post valve closed
9/4/2010	4:38:13 PM	Bubbler valve closed
9/4/2010	4:38:13 PM	Main Vac valve opened
9/4/2010	4:38:13 PM	Bypass valve opened
9/4/2010	4:38:13 PM	Helium MFC set to  0.000000
9/4/2010	4:38:13 PM	H2 MFC set to  0.000000
9/4/2010	4:38:13 PM	BCl3 MFC set to  0.000000
9/4/2010	4:38:13 PM	PHl3 MFC set to  0.000000
9/4/2010	4:38:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:38:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:38:13 PM	Tube furnace set to 0
9/4/2010	4:39:13 PM	H2 valve closed
9/4/2010	4:39:13 PM	BCl3 valve closed
9/4/2010	4:39:13 PM	PH3 valve closed
9/4/2010	4:39:13 PM	SiCl4 pre valve closed
9/4/2010	4:39:13 PM	SiCl4 post valve closed
9/4/2010	4:39:13 PM	Bubbler valve closed
9/4/2010	4:39:13 PM	Helium valve opened
9/4/2010	4:39:13 PM	Main Vac valve opened
9/4/2010	4:39:13 PM	Bypass valve opened
9/4/2010	4:39:13 PM	Helium MFC set to  100.000000
9/4/2010	4:39:13 PM	H2 MFC set to  0.000000
9/4/2010	4:39:13 PM	BCl3 MFC set to  0.000000
9/4/2010	4:39:13 PM	PHl3 MFC set to  0.000000
9/4/2010	4:39:13 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:39:13 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:39:14 PM	Tube furnace set to 0
9/4/2010	4:40:14 PM	Helium valve closed
9/4/2010	4:40:14 PM	H2 valve closed
9/4/2010	4:40:14 PM	BCl3 valve closed
9/4/2010	4:40:14 PM	PH3 valve closed
9/4/2010	4:40:14 PM	SiCl4 pre valve closed
9/4/2010	4:40:14 PM	SiCl4 post valve closed
9/4/2010	4:40:14 PM	Bubbler valve closed
9/4/2010	4:40:14 PM	Main Vac valve opened
9/4/2010	4:40:14 PM	Bypass valve opened
9/4/2010	4:40:14 PM	Helium MFC set to  0.000000
9/4/2010	4:40:14 PM	H2 MFC set to  0.000000
9/4/2010	4:40:14 PM	BCl3 MFC set to  0.000000
9/4/2010	4:40:14 PM	PHl3 MFC set to  0.000000
9/4/2010	4:40:14 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:40:14 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:40:14 PM	Tube furnace set to 0
9/4/2010	4:41:12 PM	Run aborted at 4:41 PM
9/4/2010	4:41:12 PM	Helium valve closed
9/4/2010	4:41:12 PM	H2 valve closed
9/4/2010	4:41:12 PM	BCl3 valve closed
9/4/2010	4:41:12 PM	PH3 valve closed
9/4/2010	4:41:12 PM	SiCl4 pre valve closed
9/4/2010	4:41:12 PM	SiCl4 post valve closed
9/4/2010	4:41:12 PM	Bypass valve closed
9/4/2010	4:41:12 PM	Main Vac valve closed
9/4/2010	4:41:12 PM	Bubbler valve closed
9/4/2010	4:41:12 PM	Helium MFC set to  0.000000
9/4/2010	4:41:12 PM	H2 MFC set to  0.000000
9/4/2010	4:41:12 PM	BCl3 MFC set to  0.000000
9/4/2010	4:41:12 PM	PHl3 MFC set to  0.000000
9/4/2010	4:41:12 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:41:12 PM	Tube furnace set to 0
9/4/2010	4:41:13 PM	Bypass valve opened
9/4/2010	4:41:14 PM	Main Vac valve opened
9/4/2010	4:44:33 PM	Helium MFC set to  100.000000
9/4/2010	4:44:34 PM	Helium valve opened
9/4/2010	4:46:07 PM	Helium valve closed
9/4/2010	4:47:13 PM	Bypass valve closed
9/4/2010	4:47:13 PM	Main Vac valve closed
9/4/2010	4:47:22 PM	Bypass valve opened
9/4/2010	4:47:23 PM	Main Vac valve opened
9/4/2010	4:47:27 PM	Helium valve opened
9/4/2010	4:48:15 PM	Helium valve closed
9/4/2010	4:49:17 PM	Recipe started at 4:49 PM
9/4/2010	4:49:17 PM	Helium valve closed
9/4/2010	4:49:17 PM	BCl3 valve closed
9/4/2010	4:49:17 PM	PH3 valve closed
9/4/2010	4:49:17 PM	SiCl4 pre valve closed
9/4/2010	4:49:17 PM	SiCl4 post valve closed
9/4/2010	4:49:17 PM	Main Vac valve closed
9/4/2010	4:49:17 PM	Bypass valve closed
9/4/2010	4:49:17 PM	Bubbler valve closed
9/4/2010	4:49:17 PM	H2 valve opened
9/4/2010	4:49:17 PM	Helium MFC set to  0.000000
9/4/2010	4:49:17 PM	H2 MFC set to  500.000000
9/4/2010	4:49:17 PM	BCl3 MFC set to  0.000000
9/4/2010	4:49:17 PM	PHl3 MFC set to  0.000000
9/4/2010	4:49:17 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:49:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:49:17 PM	Tube furnace set to 0
9/4/2010	4:50:35 PM	Helium valve closed
9/4/2010	4:50:35 PM	BCl3 valve closed
9/4/2010	4:50:35 PM	PH3 valve closed
9/4/2010	4:50:35 PM	SiCl4 pre valve closed
9/4/2010	4:50:35 PM	SiCl4 post valve closed
9/4/2010	4:50:35 PM	Main Vac valve closed
9/4/2010	4:50:35 PM	Bypass valve closed
9/4/2010	4:50:35 PM	H2 valve opened
9/4/2010	4:50:35 PM	Bubbler valve opened
9/4/2010	4:50:35 PM	Helium MFC set to  0.000000
9/4/2010	4:50:35 PM	H2 MFC set to  500.000000
9/4/2010	4:50:35 PM	BCl3 MFC set to  0.000000
9/4/2010	4:50:35 PM	PHl3 MFC set to  0.000000
9/4/2010	4:50:35 PM	SiCl4 MFC set to  0.000000
9/4/2010	4:50:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	4:50:35 PM	Tube furnace set to 1000
9/4/2010	5:10:35 PM	Helium valve closed
9/4/2010	5:10:35 PM	BCl3 valve closed
9/4/2010	5:10:35 PM	PH3 valve closed
9/4/2010	5:10:35 PM	Main Vac valve closed
9/4/2010	5:10:35 PM	Bypass valve closed
9/4/2010	5:10:35 PM	H2 valve opened
9/4/2010	5:10:35 PM	SiCl4 pre valve opened
9/4/2010	5:10:35 PM	SiCl4 post valve opened
9/4/2010	5:10:35 PM	Bubbler valve opened
9/4/2010	5:10:35 PM	Helium MFC set to  0.000000
9/4/2010	5:10:35 PM	H2 MFC set to  500.000000
9/4/2010	5:10:35 PM	BCl3 MFC set to  0.000000
9/4/2010	5:10:35 PM	PHl3 MFC set to  0.000000
9/4/2010	5:10:35 PM	SiCl4 MFC set to  50.000000
9/4/2010	5:10:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:10:36 PM	Tube furnace set to 1000
9/4/2010	5:30:36 PM	H2 valve closed
9/4/2010	5:30:36 PM	BCl3 valve closed
9/4/2010	5:30:36 PM	PH3 valve closed
9/4/2010	5:30:36 PM	SiCl4 pre valve closed
9/4/2010	5:30:36 PM	SiCl4 post valve closed
9/4/2010	5:30:36 PM	Main Vac valve closed
9/4/2010	5:30:36 PM	Bypass valve closed
9/4/2010	5:30:36 PM	Helium valve opened
9/4/2010	5:30:36 PM	Bubbler valve opened
9/4/2010	5:30:36 PM	Helium MFC set to  500.000000
9/4/2010	5:30:36 PM	H2 MFC set to  0.000000
9/4/2010	5:30:36 PM	BCl3 MFC set to  0.000000
9/4/2010	5:30:36 PM	PHl3 MFC set to  0.000000
9/4/2010	5:30:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:30:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:30:36 PM	Tube furnace set to 950
9/4/2010	5:35:36 PM	H2 valve closed
9/4/2010	5:35:36 PM	BCl3 valve closed
9/4/2010	5:35:36 PM	PH3 valve closed
9/4/2010	5:35:36 PM	SiCl4 pre valve closed
9/4/2010	5:35:36 PM	SiCl4 post valve closed
9/4/2010	5:35:36 PM	Main Vac valve closed
9/4/2010	5:35:36 PM	Bypass valve closed
9/4/2010	5:35:36 PM	Helium valve opened
9/4/2010	5:35:36 PM	Bubbler valve opened
9/4/2010	5:35:36 PM	Helium MFC set to  500.000000
9/4/2010	5:35:36 PM	H2 MFC set to  0.000000
9/4/2010	5:35:36 PM	BCl3 MFC set to  0.000000
9/4/2010	5:35:36 PM	PHl3 MFC set to  0.000000
9/4/2010	5:35:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:35:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:35:36 PM	Tube furnace set to 900
9/4/2010	5:40:36 PM	H2 valve closed
9/4/2010	5:40:36 PM	BCl3 valve closed
9/4/2010	5:40:36 PM	PH3 valve closed
9/4/2010	5:40:36 PM	SiCl4 pre valve closed
9/4/2010	5:40:36 PM	SiCl4 post valve closed
9/4/2010	5:40:36 PM	Main Vac valve closed
9/4/2010	5:40:36 PM	Bypass valve closed
9/4/2010	5:40:36 PM	Helium valve opened
9/4/2010	5:40:36 PM	Bubbler valve opened
9/4/2010	5:40:36 PM	Helium MFC set to  500.000000
9/4/2010	5:40:36 PM	H2 MFC set to  0.000000
9/4/2010	5:40:36 PM	BCl3 MFC set to  0.000000
9/4/2010	5:40:36 PM	PHl3 MFC set to  0.000000
9/4/2010	5:40:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:40:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:40:36 PM	Tube furnace set to 850
9/4/2010	5:45:36 PM	H2 valve closed
9/4/2010	5:45:36 PM	BCl3 valve closed
9/4/2010	5:45:36 PM	PH3 valve closed
9/4/2010	5:45:36 PM	SiCl4 pre valve closed
9/4/2010	5:45:36 PM	SiCl4 post valve closed
9/4/2010	5:45:36 PM	Main Vac valve closed
9/4/2010	5:45:36 PM	Bypass valve closed
9/4/2010	5:45:36 PM	Helium valve opened
9/4/2010	5:45:36 PM	Bubbler valve opened
9/4/2010	5:45:36 PM	Helium MFC set to  500.000000
9/4/2010	5:45:36 PM	H2 MFC set to  0.000000
9/4/2010	5:45:36 PM	BCl3 MFC set to  0.000000
9/4/2010	5:45:36 PM	PHl3 MFC set to  0.000000
9/4/2010	5:45:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:45:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:45:36 PM	Tube furnace set to 800
9/4/2010	5:50:36 PM	H2 valve closed
9/4/2010	5:50:36 PM	BCl3 valve closed
9/4/2010	5:50:36 PM	PH3 valve closed
9/4/2010	5:50:36 PM	SiCl4 pre valve closed
9/4/2010	5:50:36 PM	SiCl4 post valve closed
9/4/2010	5:50:36 PM	Main Vac valve closed
9/4/2010	5:50:36 PM	Bypass valve closed
9/4/2010	5:50:36 PM	Helium valve opened
9/4/2010	5:50:36 PM	Bubbler valve opened
9/4/2010	5:50:36 PM	Helium MFC set to  500.000000
9/4/2010	5:50:36 PM	H2 MFC set to  0.000000
9/4/2010	5:50:36 PM	BCl3 MFC set to  0.000000
9/4/2010	5:50:36 PM	PHl3 MFC set to  0.000000
9/4/2010	5:50:36 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:50:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:50:37 PM	Tube furnace set to 750
9/4/2010	5:55:37 PM	H2 valve closed
9/4/2010	5:55:37 PM	BCl3 valve closed
9/4/2010	5:55:37 PM	PH3 valve closed
9/4/2010	5:55:37 PM	SiCl4 pre valve closed
9/4/2010	5:55:37 PM	SiCl4 post valve closed
9/4/2010	5:55:37 PM	Main Vac valve closed
9/4/2010	5:55:37 PM	Bypass valve closed
9/4/2010	5:55:37 PM	Helium valve opened
9/4/2010	5:55:37 PM	Bubbler valve opened
9/4/2010	5:55:37 PM	Helium MFC set to  500.000000
9/4/2010	5:55:37 PM	H2 MFC set to  0.000000
9/4/2010	5:55:37 PM	BCl3 MFC set to  0.000000
9/4/2010	5:55:37 PM	PHl3 MFC set to  0.000000
9/4/2010	5:55:37 PM	SiCl4 MFC set to  0.000000
9/4/2010	5:55:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	5:55:37 PM	Tube furnace set to 700
9/4/2010	6:00:37 PM	H2 valve closed
9/4/2010	6:00:37 PM	BCl3 valve closed
9/4/2010	6:00:37 PM	PH3 valve closed
9/4/2010	6:00:37 PM	SiCl4 pre valve closed
9/4/2010	6:00:37 PM	SiCl4 post valve closed
9/4/2010	6:00:37 PM	Main Vac valve closed
9/4/2010	6:00:37 PM	Bypass valve closed
9/4/2010	6:00:37 PM	Helium valve opened
9/4/2010	6:00:37 PM	Bubbler valve opened
9/4/2010	6:00:37 PM	Helium MFC set to  500.000000
9/4/2010	6:00:37 PM	H2 MFC set to  0.000000
9/4/2010	6:00:37 PM	BCl3 MFC set to  0.000000
9/4/2010	6:00:37 PM	PHl3 MFC set to  0.000000
9/4/2010	6:00:37 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:00:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	6:00:37 PM	Tube furnace set to 0
9/4/2010	6:05:57 PM	Run aborted at 6:05 PM
9/4/2010	6:05:57 PM	Helium valve closed
9/4/2010	6:05:57 PM	H2 valve closed
9/4/2010	6:05:57 PM	BCl3 valve closed
9/4/2010	6:05:57 PM	PH3 valve closed
9/4/2010	6:05:57 PM	SiCl4 pre valve closed
9/4/2010	6:05:57 PM	SiCl4 post valve closed
9/4/2010	6:05:57 PM	Bypass valve closed
9/4/2010	6:05:57 PM	Main Vac valve closed
9/4/2010	6:05:57 PM	Bubbler valve closed
9/4/2010	6:05:57 PM	Helium MFC set to  0.000000
9/4/2010	6:05:57 PM	H2 MFC set to  0.000000
9/4/2010	6:05:57 PM	BCl3 MFC set to  0.000000
9/4/2010	6:05:57 PM	PHl3 MFC set to  0.000000
9/4/2010	6:05:57 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:05:57 PM	Tube furnace set to 0
9/4/2010	6:05:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	6:05:59 PM	Recipe started at 6:05 PM
9/4/2010	6:05:59 PM	H2 valve closed
9/4/2010	6:05:59 PM	BCl3 valve closed
9/4/2010	6:05:59 PM	PH3 valve closed
9/4/2010	6:05:59 PM	SiCl4 pre valve closed
9/4/2010	6:05:59 PM	SiCl4 post valve closed
9/4/2010	6:05:59 PM	Main Vac valve closed
9/4/2010	6:05:59 PM	Bypass valve closed
9/4/2010	6:05:59 PM	Bubbler valve closed
9/4/2010	6:05:59 PM	Helium valve opened
9/4/2010	6:05:59 PM	Helium MFC set to  500.000000
9/4/2010	6:05:59 PM	H2 MFC set to  0.000000
9/4/2010	6:05:59 PM	BCl3 MFC set to  0.000000
9/4/2010	6:05:59 PM	PHl3 MFC set to  0.000000
9/4/2010	6:05:59 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:05:59 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	6:05:59 PM	Tube furnace set to 0
9/4/2010	6:06:00 PM	Helium valve closed
9/4/2010	6:06:00 PM	H2 valve closed
9/4/2010	6:06:00 PM	BCl3 valve closed
9/4/2010	6:06:00 PM	PH3 valve closed
9/4/2010	6:06:00 PM	SiCl4 pre valve closed
9/4/2010	6:06:00 PM	SiCl4 post valve closed
9/4/2010	6:06:00 PM	Main Vac valve closed
9/4/2010	6:06:00 PM	Bypass valve closed
9/4/2010	6:06:00 PM	Bubbler valve closed
9/4/2010	6:06:00 PM	Helium MFC set to  0.000000
9/4/2010	6:06:00 PM	H2 MFC set to  0.000000
9/4/2010	6:06:00 PM	BCl3 MFC set to  0.000000
9/4/2010	6:06:00 PM	PHl3 MFC set to  0.000000
9/4/2010	6:06:00 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:06:00 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	6:06:00 PM	Tube furnace set to 0
9/4/2010	6:06:00 PM	Run finished at 6:06 PM
9/4/2010	6:06:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2010	6:11:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2010	6:11:14 PM	Recipe started at 6:11 PM
9/4/2010	6:11:14 PM	Helium valve closed
9/4/2010	6:11:14 PM	H2 valve closed
9/4/2010	6:11:14 PM	BCl3 valve closed
9/4/2010	6:11:14 PM	PH3 valve closed
9/4/2010	6:11:14 PM	SiCl4 pre valve closed
9/4/2010	6:11:14 PM	SiCl4 post valve closed
9/4/2010	6:11:14 PM	Main Vac valve closed
9/4/2010	6:11:14 PM	Bubbler valve closed
9/4/2010	6:11:14 PM	Bypass valve opened
9/4/2010	6:11:14 PM	Helium MFC set to  0.000000
9/4/2010	6:11:14 PM	H2 MFC set to  0.000000
9/4/2010	6:11:14 PM	BCl3 MFC set to  0.000000
9/4/2010	6:11:14 PM	PHl3 MFC set to  0.000000
9/4/2010	6:11:14 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:11:14 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	6:11:14 PM	Tube furnace set to 0
9/4/2010	6:11:55 PM	Helium valve closed
9/4/2010	6:11:55 PM	H2 valve closed
9/4/2010	6:11:55 PM	BCl3 valve closed
9/4/2010	6:11:55 PM	PH3 valve closed
9/4/2010	6:11:55 PM	SiCl4 pre valve closed
9/4/2010	6:11:55 PM	SiCl4 post valve closed
9/4/2010	6:11:55 PM	Bubbler valve closed
9/4/2010	6:11:55 PM	Main Vac valve opened
9/4/2010	6:11:55 PM	Bypass valve opened
9/4/2010	6:11:55 PM	Helium MFC set to  0.000000
9/4/2010	6:11:55 PM	H2 MFC set to  0.000000
9/4/2010	6:11:55 PM	BCl3 MFC set to  0.000000
9/4/2010	6:11:55 PM	PHl3 MFC set to  0.000000
9/4/2010	6:11:55 PM	SiCl4 MFC set to  0.000000
9/4/2010	6:11:55 PM	Bypass solenoid MFC set to  0.000000
9/4/2010	6:11:55 PM	Tube furnace set to 0
9/4/2010	6:11:55 PM	Run finished at 6:11 PM
9/4/2010	6:11:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
